Title:
FLOW SENSOR
Document Type and Number:
Japanese Patent JP2018141664
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a flow sensor showing sensitivity even under high flow rate.SOLUTION: The flow sensor includes a heater 5 wired in one direction and a thermopile 6a which has a plurality of hot junctions 613 and is provided on both sides of the heater 5. The plurality of hot junctions 613 are arranged at a plurality of points at different distances from the heater 5 in a direction perpendicular to the wiring direction of the heater 5.SELECTED DRAWING: Figure 1
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Inventors:
OGISO YASUHIRO
Application Number:
JP2017034868A
Publication Date:
September 13, 2018
Filing Date:
February 27, 2017
Export Citation:
Assignee:
AZBIL CORP
International Classes:
G01F1/692; G01F1/688
Domestic Patent References:
| JP2000304584A | 2000-11-02 | |||
| JP2000292234A | 2000-10-20 | |||
| JP2015017903A | 2015-01-29 |
Foreign References:
| US20100078753A1 | 2010-04-01 |
Attorney, Agent or Firm:
Hideaki Tazawa
Hamada Hatsune
Nakashima Shigeru
Tatsuya Sakamoto
Tsujioka Masaaki
Kazuma Inoue
Hamada Hatsune
Nakashima Shigeru
Tatsuya Sakamoto
Tsujioka Masaaki
Kazuma Inoue