To provide a fluid apparatus unit structure effective in the reduction of foot print or the like by integrating and unifying a plurality of fluid apparatuses.

In a fluid apparatus unit structure having a plurality of fluid apparatuses connected to one another through flow passages integrated in parallel on a base member 10, the base member 10 provided with a plurality of mounting faces 11 for mounting a pure water opening/closing valve 5 is equipped with a pure water circulation supply line 2 which penetrates the base member 10 and is connected in parallel with the pure water opening/closing valve 5 through a pure water branch passage 4.

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