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Title:
FLUID BEARING AND STAGE DEVICE
Document Type and Number:
Japanese Patent JP2011075084
Kind Code:
A
Abstract:

To improve use efficiency of a working fluid in a fluid bearing.

The fluid bearing includes a pumping section 340 for supplying gas to a space 301 between a first member and a second member moving along the surface of the first member; and a return section 394 for returning the gas from the space 301 to the pumping section 340. The return section 394 may return the gas from the space 301 in the process in which the gas supplied from the pumping section 340 to the space 301 flows from the space 301 to the exterior. The pumping section 340 and the return section 394 may be mounted on the second member so as to move together with the second member. The pumping section 340 may include a tank storing compressed gas. The return section 394 may further include a recovery section for sucking and recovering the gas leaked between the first member and the second member, while being mounted on the second member and moving together with the second member.


Inventors:
Tanaka, Keiichi
Application Number:
JP2009000229920
Publication Date:
April 14, 2011
Filing Date:
October 01, 2009
Export Citation:
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Assignee:
NIKON CORP
International Classes:
F16C32/06; H01L21/02; H01L21/027



 
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