Title:
FLUID CIRCUIT WITH INTEGRATED ELECTROSTATIC DISCHARGE MITIGATION
Document Type and Number:
Japanese Patent JP2022132343
Kind Code:
A
Abstract:
To improve electrostatic discharge (ESD) mitigation in an ultra-pure fluid handling system.SOLUTION: A fluid circuit includes a plurality of tubing segments and a plurality of operative components. Each of the tubing segments includes i) a non-conductive polymer portion defining a fluid passageway and ii) one or more interior conductive fluoropolymer stripes extending axially to the ends of the tubing segment. Each of the operative components includes a conductive fluoropolymer that extends between a plurality of tubing connector fittings forming a part of the fluid circuit. Each of the tubing connector fittings conductively connects each conductor of the operative component to the interior conductive fluoropolymer stripes of the tubing segment to provide a path to ground that extends through each operative component and each tubing segment.SELECTED DRAWING: Figure 1
Inventors:
Rays, John
Linder, James Sea.
Mackenzie, Jeffrey Jay.
Gregerson, Barry
Rice show, Brett Sea.
Linder, James Sea.
Mackenzie, Jeffrey Jay.
Gregerson, Barry
Rice show, Brett Sea.
Application Number:
JP2022108966A
Publication Date:
September 08, 2022
Filing Date:
July 06, 2022
Export Citation:
Assignee:
Entegris Incorporated
International Classes:
F16L11/127; F16L19/04; H01L21/304
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Atsushi Honda
Hironobu Onda
Atsushi Honda
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