Title:
流体制御装置
Document Type and Number:
Japanese Patent JP5900155
Kind Code:
B2
Abstract:
A fluid control device (101) includes a vibrating plate unit (160), a driver (142), and a flexible plate (151). The vibrating plate unit (16) includes a vibrating plate (141) including a first main surface and a second main surface, and a frame plate (161) surrounding the surroundings of the vibrating plate (141). The driver (142) is provided on the first main surface of the vibrating plate (141), and vibrates the vibrating plate. The flexible plate (151) has a hole (152) formed thereon. Furthermore, the flexible plate (151) faces the second main surface of the vibrating plate (141), and adheres to the frame plate by the adhesive agent (120) that contains a plurality of particles (121) arranged such that the plurality of particles are interposed between the flexible plate and the vibrating plate.
Inventors:
Atsuhiko Hirata
Sadan Ando
Maeda Takenobu
Kodama Koji
Kenta Omori
Makino Sei
Sadan Ando
Maeda Takenobu
Kodama Koji
Kenta Omori
Makino Sei
Application Number:
JP2012119755A
Publication Date:
April 06, 2016
Filing Date:
May 25, 2012
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F04B45/047; F04B43/04
Domestic Patent References:
| JP4638820B2 |
Foreign References:
| WO2011040320A1 |
Attorney, Agent or Firm:
Kaede International Patent Office