Title:
Fluid control apparatus
Document Type and Number:
Japanese Patent JP6028779
Kind Code:
B2
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Inventors:
Atsuhiko Hirata
Sadan Ando
Maeda Takenobu
Kodama Koji
Kenta Omori
Sadan Ando
Maeda Takenobu
Kodama Koji
Kenta Omori
Application Number:
JP2014204639A
Publication Date:
November 16, 2016
Filing Date:
October 03, 2014
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F04B45/047; F04B45/04
Domestic Patent References:
| JP2008537057A | ||||
| JP2005238761A | ||||
| JP2007203483A | ||||
| JP2004332705A |
Foreign References:
| WO2008069264A1 | ||||
| WO2011040320A1 |
Attorney, Agent or Firm:
Kaede International Patent Office