Title:
Fluid control apparatus
Document Type and Number:
Japanese Patent JP6152432
Kind Code:
B2
Abstract:
[Object] To provide a fluid control device with a structured that can give a sufficient tension to a diaphragm part formed by a film sandwiched between two plates. [Solution] A film 4 is sandwiched between a first plate 2 and a second plate 3. Outer convex parts 14 formed on the second plate 3 are formed so that their protrusion height dimension H2 is larger than an inner convex part 12. The outer convex part 14 is formed so that its width dimension W2 is smaller than the inner convex part 12. When the first plate 2 and second plate 3 are face-joined together, the film 4 is sandwiched between outer concave parts 13 and the outer convex parts 14, after which the film 4 is sandwiched between an inner concave part 11 and an inner convex part 12 and a tension is given to a diaphragm part 4a stretched in concave flow paths 5a and 5b.
Inventors:
Junko Ito
Yasushi Watanabe
Yasushi Watanabe
Application Number:
JP2015559886A
Publication Date:
June 21, 2017
Filing Date:
January 21, 2015
Export Citation:
Assignee:
ALPS ELECTRIC CO.,LTD.
International Classes:
F04B43/02; F04B45/04; F16K7/17
Domestic Patent References:
| JP59186558U | ||||
| JP6451781U | ||||
| JP2013119799A |
Foreign References:
| US4304260 | ||||
| US4181245 |
Attorney, Agent or Firm:
野▲崎▼ 照夫
Iwao Hirayama
Masahiro Matsushita
Katsuyuki Okubo
Iwao Hirayama
Masahiro Matsushita
Katsuyuki Okubo