Title:
FLUID CONTROL DEVICE OF MICRO-ELECTROMECHANICAL SYSTEM
Document Type and Number:
Japanese Patent JP2019044768
Kind Code:
A
Abstract:
To provide a fluid control device of a micro-electromechanical system.SOLUTION: A fluid control device of a micro-electromechanical system is composed of at least one flow guide unit. At least one flow guide unit includes an inlet plate, a substrate, a resonance membrane, an actuator membrane and an outlet plate sequentially stacked. A first chamber is defined between the resonance membrane and the actuator membrane, and a second chamber is defined between the actuator membrane and the outlet plate. When the piezoelectric membrane drives the actuator membrane, a fluid is inhaled into a convergence chamber of the substrate via an inlet hole of the inlet plate, transported into the first chamber via a hollow hole of the resonance membrane, transported into the second chamber via a vacant space of the actuator membrane, and discharged out from an outlet hole of the outlet plate, so as to control circulation of the fluid.SELECTED DRAWING: Figure 2
Inventors:
MOU HAO-JAN
HSUEH TA-WEI
CHANG YING-LUN
YU RONG-HO
CHANG CHEN-MING
TAI HSIEN-CHUNG
RYO BUNYU
HAN YUNG-LUNG
HUANG CHI-FENG
HSUEH TA-WEI
CHANG YING-LUN
YU RONG-HO
CHANG CHEN-MING
TAI HSIEN-CHUNG
RYO BUNYU
HAN YUNG-LUNG
HUANG CHI-FENG
Application Number:
JP2018161515A
Publication Date:
March 22, 2019
Filing Date:
August 30, 2018
Export Citation:
Assignee:
MICROJET TECHNOLOGY CO LTD
International Classes:
F04B45/047; F04B43/02; F04B43/09; F04B45/04
Domestic Patent References:
| JP2013057247A | 2013-03-28 | |||
| JP2017119439A | 2017-07-06 | |||
| JP2009121333A | 2009-06-04 | |||
| JP2017002909A | 2017-01-05 | |||
| JP2013245649A | 2013-12-09 | |||
| JP2017080946A | 2017-05-18 | |||
| JP2009078527A | 2009-04-16 |
Attorney, Agent or Firm:
Hiroaki Yamauchi
Takeshi Yamada
Takeshi Yamada