To provide a fluid control device capable of reducing the variation of pressure-flow rate characteristics by preventing the vibration of a vibrating plate from being inhibited by the inflow of an adhesive.
The piezoelectric pump 101 includes a vibrating plate unit 160 and a flexible plate 151. The vibrating plate unit 160 includes a vibrating plate 141, a frame plate 161, and a connecting portion 162. The frame plate 161 is provided around the vibrating plate 141, and the vibrating plate 141 is flexibly elastically supported at three points relative to the frame plate 161 by three connecting portions 162. The frame plate 161 is fixed to the flexible plate 151 through an adhesive layer 120 containing a plurality of fine particles 121. Namely, the main surface of the vibrating plate 141 is disposed away from the flexible plate 151 by a distance corresponding to the diameter of the fine particles 121.
ANDO SADANORI
MAEDA TAKENOBU
KODAMA KOJI
OMORI KENTA
MAKINO SEI
| JP4638820B2 | 2011-02-23 |
| WO2011040320A1 | 2011-04-07 |