Title:
FLUID CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2015124851
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a fluid control device whose configuration is simple, which can easily increase/decrease the number of opening/closing valves and which can further decrease dead volume.SOLUTION: A main body 2 is formed by a plurality of passage blocks 3 being arranged. Each passage block 3, as a passage for forming a main gas passage 9, includes: a first reversed V-shaped passage 15; and a first outlet passage 16 for communicating an apex of the first reversed V-shaped passage 15 and an outlet of a first opening/closing valve 4. As a passage for forming a vent gas passage 10, it includes: a second reversed V-shaped passage 17; and a second outlet passage 18 for communicating an apex of the second V-shaped passage 17 and an outlet of a second opening/closing valve 5. As a passage for forming a first sub gas inflow passage 11, it includes: a first inlet passage 19 for communicating with an inlet of the first opening/closing valve 4, and a common inlet passage 20. As a passage for forming a second sub gas inflow passage 12, it includes: a second inlet passage 21 for communicating with an inlet of the second opening/closing valve 5, and a communication passage 22 for communicating with the common inlet passage 20.
Inventors:
KITANO TAICHI
SHINOHARA TSUTOMU
YAKUSHIJIN TADAYUKI
NAKADA TOMOHIRO
TANIGAWA TAKESHI
YAMAJI MICHIO
SHINOHARA TSUTOMU
YAKUSHIJIN TADAYUKI
NAKADA TOMOHIRO
TANIGAWA TAKESHI
YAMAJI MICHIO
Application Number:
JP2013271003A
Publication Date:
July 06, 2015
Filing Date:
December 27, 2013
Export Citation:
Assignee:
FUJIKIN KK
International Classes:
F16K27/00; F16K7/12; F16K41/12
Domestic Patent References:
| JP2013231460A | 2013-11-14 | |||
| JPH10300000A | 1998-11-13 | |||
| JP2001521120A | 2001-11-06 | |||
| JP2010084854A | 2010-04-15 | |||
| JP2000274542A | 2000-10-03 |
Foreign References:
| US5050631A | 1991-09-24 | |||
| WO2004036099A1 | 2004-04-29 | |||
| US20130333768A1 | 2013-12-19 | |||
| WO2013084744A1 | 2013-06-13 | |||
| WO2007032147A1 | 2007-03-22 |
Attorney, Agent or Firm:
Akira Watanabe
Matsumura Naoto
Einosuke Kishimoto
Matsumura Naoto
Einosuke Kishimoto