Title:
Fluid control device
Document Type and Number:
Japanese Patent JP5919089
Kind Code:
B2
More Like This:
Inventors:
Masayuki Koji
Hiroshi Itato
Hiroshi Itato
Application Number:
JP2012111201A
Publication Date:
May 18, 2016
Filing Date:
May 15, 2012
Export Citation:
Assignee:
CKD Corporation
International Classes:
B01J7/02; B01D1/22; C23C16/448; F22B1/28; H01L21/31; H05B3/00
Domestic Patent References:
JP2011040067A1 | ||||
JP201197088A | ||||
JP200557193A | ||||
JP747201A | ||||
JP11500659A | ||||
JP6232035A | ||||
JP2009194246A | ||||
JP7155584A | ||||
JP2004363562A | ||||
JP2008263244A |
Foreign References:
GB1439603A |
Attorney, Agent or Firm:
Tsuyoshi Yamada
Hiroshi Matsuda
Hiroshi Matsuda
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