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Patent Searching and Data


Title:
Fluid control device
Document Type and Number:
Japanese Patent JP5919089
Kind Code:
B2
Inventors:
Masayuki Koji
Hiroshi Itato
Application Number:
JP2012111201A
Publication Date:
May 18, 2016
Filing Date:
May 15, 2012
Export Citation:
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Assignee:
CKD Corporation
International Classes:
B01J7/02; B01D1/22; C23C16/448; F22B1/28; H01L21/31; H05B3/00
Domestic Patent References:
JP2011040067A1
JP201197088A
JP200557193A
JP747201A
JP11500659A
JP6232035A
JP2009194246A
JP7155584A
JP2004363562A
JP2008263244A
Foreign References:
GB1439603A
Attorney, Agent or Firm:
Tsuyoshi Yamada
Hiroshi Matsuda