Title:
流体制御装置
Document Type and Number:
Japanese Patent JP6585741
Kind Code:
B2
Abstract:
A fluid control device includes a piezoelectric actuator (2), a housing (1) and a glue body (5). The piezoelectric actuator (2) includes a suspension plate (21), an outer frame (23), a bracket (24) and a piezoelectric element (22). The housing (1) includes an outlet plate (11) and a base (12). The outlet plate (11) accommodates the piezoelectric actuator (2) and the base (12) includes an inlet plate (121) and a resonance plate (122). The glue body (5) is arranged between the outer frame (23) and the resonance plate (122) to maintain a gap (h) formed therebetween. The suspension plate (21) is made of a material having a linear expansion coefficient less than a linear expansion coefficient of the piezoelectric element (22). The suspension plate (21) has a specified hardness to maintain curved after being heated, and the linear expansion coefficient of the suspension plate (21) is different from a linear expansion coefficient of the resonance plate (122), so that an effective deformation displacement (´) between the suspension plate (21) and the resonance plate (122) is obtained.
Inventors:
Huang Tetsui
Chen Sechang
House
Han Yong Long
Chen Sechang
House
Han Yong Long
Application Number:
JP2018000325A
Publication Date:
October 02, 2019
Filing Date:
January 04, 2018
Export Citation:
Assignee:
Microjet Technology Co.,Ltd.
International Classes:
F04B45/04; F04B45/047
Domestic Patent References:
| JP2013057246A | ||||
| JP2013057247A |
Foreign References:
| CN205383064U |
Attorney, Agent or Firm:
Hiroaki Yamauchi
Takeshi Yamada
Michio Nagai
Takeshi Yamada
Michio Nagai