Title:
流体制御装置
Document Type and Number:
Japanese Patent JP6892013
Kind Code:
B2
Abstract:
A fluid control device includes: a case that includes a case top plate having a first vent hole, a case side plate, and a case bottom plate having a second vent hole; a pump body; and a holding member that holds the pump body relative to the case. The pump body includes a first main plate, a second main plate that faces one main surface of the first main plate, a side plate, and a driving member that is arranged on the first main plate. The first main plate includes a plurality of first openings arranged in a ring shape. The second main plate is arranged at a side of the first main plate nearer the case top plate and has a second opening at a position that overlaps the first vent hole in a plan view.
Inventors:
Shin Tanaka
Application Number:
JP2020521756A
Publication Date:
June 18, 2021
Filing Date:
April 04, 2019
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F04B45/04; F04B45/047
Domestic Patent References:
| JP2017521181A |
Foreign References:
| WO2014024608A1 | ||||
| WO2017038565A1 |
Attorney, Agent or Firm:
Kaede International Patent Office