Title:
流体制御装置
Document Type and Number:
Japanese Patent JP6973615
Kind Code:
B2
Abstract:
A fluid control device includes a housing. The housing includes a first main plate, a second main plate, and a side plate connecting the first main plate and the second main plate. The housing has a pump chamber defined by the first main plate, the second main plate, and the side plate. The fluid control device also includes a driver, a first hole that extends through the first main plate or the second main plate, and a first recess formed in the first main plate between a center and a circumference or the second main plate between a center and a circumference.
Inventors:
Shin Tanaka
Application Number:
JP2020500273A
Publication Date:
December 01, 2021
Filing Date:
November 08, 2018
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F04B45/04
Domestic Patent References:
| JP2015522123A |
Foreign References:
| WO2016181833A1 | ||||
| WO2015125608A1 |
Attorney, Agent or Firm:
Kaede International Patent Office