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Patent Searching and Data


Title:
FLUID CONTROL DEVICE
Document Type and Number:
Japanese Patent JPH10184616
Kind Code:
A
Abstract:

To continuously control the throughput of a fluid.

A fluid control device is provided with a base 11 formed locally thin and provided with a diaphragm 11e, an opposed member 12 opposed to the base 11 so as to form passage space 17 for a fluid to pass through between the base 11 and opposed member 12, bending means 18 for bending the diaphragm 11e onto the passage space 17 side in order to control the passage of the fluid, flexure detecting means 14 for detecting the flexure of the diaphragm 11e. The bending means 18 is made act on the basis of the flexure quantity detected by the flexure detecting means 14.


Inventors:
NAKAMURA TAKURO
Application Number:
JP35077896A
Publication Date:
July 14, 1998
Filing Date:
December 27, 1996
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
F15C3/04; (IPC1-7): F15C3/04
Attorney, Agent or Firm:
Shigeji Sato (1 person outside)