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Title:
FLUID CONTROLLER AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2023170492
Kind Code:
A
Abstract:
To provide a fluid controller which can prevent adhesion of components of control fluid to a liquid contact surface of a diaphragm member, and a manufacturing method thereof.SOLUTION: A fluid controller comprises: an input flow passage 121a into which a control fluid is input; an output flow passage 121b which is in communication with the input flow passage 121a and from which control fluid (for example, medical liquid) is output; and a diaphragm member 122 composed of a fluorine resin. The diaphragm member 122 comprises a thin film part 124 having flexibility, and the control fluid is controlled by elastic deformation of the thin film part 124. The thin film part 124 comprises a liquid contact surface which makes contact with control fluid, and at least a part of the liquid contact surface is a mold-transferred surface 127.SELECTED DRAWING: Figure 2

Inventors:
ISHIKAWA SHINJI
YASUE HIROTO
TSUNEZUKA ATSUSHI
Application Number:
JP2022082302A
Publication Date:
December 01, 2023
Filing Date:
May 19, 2022
Export Citation:
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Assignee:
CKD CORP
International Classes:
F16J3/02; F16K7/12
Attorney, Agent or Firm:
Patent Attorney Corporation Cosmos International Patent and Trademark Office