To provide a fluid control integrated unit in which space saving of a fluid switching structure can be achieved.
At both ends of fluid control units 2A to 2E, a first input/output unit 3 and a second input/output unit 4 are arranged in surface contact with each other, a first port 7 and a second port 8 are installed in a first input/output block 30 of the first input/output unit 3, a first two-way valve 11 for switching a continuity condition between the first port 7 and a first common flow path 5 and a second two-way valve 12 for switching a continuity condition between the second port 8 and a second common flow path 6 are mounted on the first input/output block 30 of the first input/output unit 3, and meantime, a third port 9 and a fourth port 10 are installed in the second input/output block 40 of the second input/output unit 4, and a third two-way valve 13 for switching a continuity condition between a third port 9 and the first common flow path 5 and a fourth two-way valve 14 for switching a continuity condition between the fourth port 10 and the second common flow path 6 are mounted in the second input/output block 40 of the second input/output unit 4.
KATO ATSUSHI
JP2007327542A | 2007-12-20 | |||
JPH0484978U | 1992-07-23 | |||
JP2003185039A | 2003-07-03 | |||
JP2007327542A | 2007-12-20 | |||
JPH0484978U | 1992-07-23 | |||
JP2003185039A | 2003-07-03 |