To provide a fluid control valve using operation air for controlling the valve opening of a main valve element relative to a valve seat while surely suppressing the occurrence of a water hammer phenomenon and more quickly closing the main valve element, and to provide an operation air intermediate valve to be piped between an operation air suction/exhaust source and a single-acting type air operating valve for surely suppressing the occurrence of the water hammer phenomenon in the single-acting type air operating valve by controlling the operation air in the single-acting type air operating valve.
The fluid control valve 1 comprises a second valve seat 23 formed in a main communication passage 25 linking an operation air flow path 24 with a pressure chamber 21, a second valve element 50 formed with an orifice communication passage 55 linking the operation air flow path 24 in communication with the pressure chamber 21, and a second spring for energizing the second valve element 50. The second valve element 50 abuts on the second valve seat 23 with the energizing force of the second spring to close the main communication passage 25 before the main valve element 30 abuts on the main valve seat 16, and changes over the flow of the operation air OA from the main communication passage 25 only to the orifice communication passage 55.
SUGIYAMA MEGUMI
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