Title:
FLUID CONTROLLER
Document Type and Number:
Japanese Patent JP2008185077
Kind Code:
A
Abstract:
To provide a fluid controller with improved vibration isolating property without affecting pressure control operation.
Pressure of a fluid is controlled by a valve element 4 moving with respect to a valve seat 3 due to change of balance between fluid pressure applied to a diaphragm 10 and elastic force generated by a pressure setting spring 13. A vibration isolating member 17 is disposed on a disc-like movable member 12 moving integrally with the diaphragm 10. The vibration isolating member 17 has a weight disposed between elastic bodies and is incorporated in a casing.
Inventors:
KOGAI MUTSUNORI
Application Number:
JP2007017490A
Publication Date:
August 14, 2008
Filing Date:
January 29, 2007
Export Citation:
Assignee:
FUJIKIN KK
International Classes:
F16K17/30; F16K47/02
Domestic Patent References:
| JP2009512015A | 2009-03-19 | |||
| JPH10272376A | 1998-10-13 | |||
| JP4013586B | ||||
| JP2004190838A | 2004-07-08 | |||
| JP2005199391A | 2005-07-28 | |||
| JPH01182647A | 1989-07-20 | |||
| JPS58137632A | 1983-08-16 | |||
| JPS5464886A | 1979-05-25 |
Attorney, Agent or Firm:
Norihiko Hibi
Einosuke Kishimoto
Akira Watanabe
Kiyosue Yasuko
Einosuke Kishimoto
Akira Watanabe
Kiyosue Yasuko
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