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Title:
FLUID CONTROLLING APPARATUS
Document Type and Number:
Japanese Patent JP2013221753
Kind Code:
A
Abstract:

To downsize a fluid controlling apparatus, as a structure capable of greatly reducing width direction dimensions as compared with a conventional one without deteriorating pressure measurement sensitivity, and capable of reducing the width direction dimensions of a casing while ensuring the mechanical strength of the casing.

A fluid controlling apparatus includes a body unit 1, a fluid control valve 4, pressure sensors 2A and 2B, and a casing 7. The fluid control valve 4 is attached to a component installation surface 1x of the body unit 1, and the pressure sensors 2A and 2B are attached to the component installation surface 1x so as to make a pressure-sensitive surface 2b1 become generally vertical to the component installation surface 1x and generally parallel in a longitudinal direction. On side walls 7a and 7b of the casing, an inner surface is made to have a recessed/projecting shape. Parts opposing to the fluid control valve 4 and the pressure sensors 2A and 2B are made to be thin-wall portions P1-P3, and at least a part of parts which do not oppose to the fluid control valve 4 and the pressure sensors 2A and 2B are made to be thick-wall portions Q1 thicker than the thin-wall portions P1-P3.


Inventors:
YASUDA TADAHIRO
Application Number:
JP2012091373A
Publication Date:
October 28, 2013
Filing Date:
April 12, 2012
Export Citation:
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Assignee:
HORIBA STEC CO LTD
International Classes:
G01L19/00
Domestic Patent References:
JP2001242940A2001-09-07
JPS6286513U1987-06-02
JP2007052616A2007-03-01
JP2000151136A2000-05-30
JP2004226142A2004-08-12
Foreign References:
WO2011040270A12011-04-07
Attorney, Agent or Firm:
Ryuhei Nishimura
Akiko Sato
Saito Shindai