To precisely and easily supply a fluid to a substrate by providing a head member having plural fluid injectors and a means for controlling the amt. of the fluid to be supplied to a workpiece.
Two parallel head members 11 and 11' each having plural fluid injectors are provided with the means 23 and 23' to seal the second fluids 25 and 25' at a second pressure almost equal to or higher than the pressure of the first fluids 15 and 15'. The first fluids 15 and 15', e.g. an epoxy resin soln., are supplied to the specified positions 17 and 17' on a glass substrate 19 as the workpiece. Namely, the substrate 19 is coated with the fluids before being used as the material for a printed circuit board. At this time, the second fluids 25 and 25', e.g. nitrogen, are supplied to the specified positions 17 and 17' to limit the first fluids 15 and 15' and collided with almost the central position of the feeder 10. The fluids are supplied to the substrate 19 precisely and easily in this way.
Hedrick, Jeffrey C.
Japp, Robert M.
Tisdale, Stephen L.
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