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Patent Searching and Data


Title:
FLUID FLOW MEASURING AND PROPORTIONAL FLUID FLOW CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2011138496
Kind Code:
A
Abstract:

To provide a fluid flow measuring and control device for measuring a flow speed based on a pressure reduction generated by a restrictive flow element.

The device includes a proportional flow valve 10 having a fluid inlet and a fluid outlet, and an actuator 17 for modulating the proportional flow valve 10. The restrictive flow element 15 includes a fluid inlet and a fluid outlet in communication with the proportional flow valve 10, and generates a pressure reduction between the fluid inlet and the fluid outlet of the restrictive flow element 15. The device further includes means 24, 25 for measuring the pressure reduction; a means 16 for calculating the flow rate based on the pressure reduction; pressure reduction measurement means 24, 25 for controlling the fluid flow through the proportional flow valve 10 in response to the measured pressure reduction; and a control means (not shown) in communication with the actuator 17.


Inventors:
WARGO CHRISTOPHER
NIERMEYER J KARL
SHYU JIEH-HWA
BRODEUR CRAIG L
BASSER WILLIAM
Application Number:
JP2010270957A
Publication Date:
July 14, 2011
Filing Date:
December 03, 2010
Export Citation:
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Assignee:
ENTEGRIS INC
International Classes:
G01F1/00; G01P5/14; G01F1/44; G05D7/06; G05B13/02
Domestic Patent References:
JPH09504628A1997-05-06
JPH07319551A1995-12-08
JPH0863235A1996-03-08
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita