Title:
FLUID FLOW RATE CONTROLLER
Document Type and Number:
Japanese Patent JPH05341851
Kind Code:
A
Abstract:
PURPOSE:To control the fluid flow rate within an allowable range even if a control valve becomes disabled and also to carry on a smooth operation of a controller. CONSTITUTION:A back-up control valve 17 is arranged in series to a control valve 2. Thus the valve 17 can function in place of the valve 2 with a control signal 24 even if the valve 2 becomes disabled by a fail-safe function. Therefore a fluid flow rate controller can keep its operation.
Inventors:
SAKO YOSHITAKA
Application Number:
JP14960892A
Publication Date:
December 24, 1993
Filing Date:
June 09, 1992
Export Citation:
Assignee:
BABCOCK HITACHI KK
International Classes:
G05D7/06; G05D16/20; (IPC1-7): G05D7/06; G05D16/20
Attorney, Agent or Firm:
Kenjiro Take