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Patent Searching and Data


Title:
FLUID HEATING DEVICE AND SUBSTRATE PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP2012087983
Kind Code:
A
Abstract:

To provide a technology to promptly heat and cool a fluid receiver.

A spiral tube 4 is disposed around a halogen lamp 21, and a cylindrical body 5 constituted of a material through which heat ray of the halogen lamp 21 transmits, is disposed between the halogen lamp 21 and the spiral tube 4 while covering the halogen lamp 21. Further, a cooling liquid nozzle is disposed to supply cooling liquid toward the spiral tube 4. The spiral tube 4 is promptly heated by the halogen lamp 21, and promptly cooled by directly supplying the cooling liquid thereto.


Inventors:
KAMIKAWA YUJI
NAKAJIMA MIKIO
Application Number:
JP2010000234670
Publication Date:
May 10, 2012
Filing Date:
October 19, 2010
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
F24H1/10; H01L21/027; H01L21/304
Domestic Patent References:
JPH09210577A1997-08-12
JP2007017098A2007-01-25
JP2001017851A2001-01-23
JPH10165911A1998-06-23
JP2002334860A2002-11-22
Attorney, Agent or Firm:
井上 俊夫
瀧澤 宣明