流動材料供給装置

Japanese Patent JP7102811

B2

To provide a fluid material supply device in which sealing performance when a valve body 24a of an on-off valve 24 closes an opening 13a of an orifice part 13 is secured, reliability of durability of the orifice part 13 is prevented from deteriorating even when the thickness of the orifice part 13 is small, and coping with a case where a fluid material is changed and a case where supply amount per unit time to a chamber to which the fluid material is supplied is changed is easily performed.SOLUTION: A fluid material supply device comprises: a bottomed cylindrical member 15, separate from a member (block member 2) constituting an orifice part 13, which is provided on the upstream side than the orifice part 13 in a flow channel (supply channel 12) of a fluid material, and at a bottom part of which an opening 15b being continuous with an opening 13a of the orifice part 13 and having a larger diameter than the opening 13a is formed; and an on-off valve 24 which has a valve body 24a separating and contacting along a central axis of the opening 15b on the upstream side with respect to the opening 15b of the bottomed cylindrical member 15 in the flow channel, and opens/closes the opening 15b by separating/contacting of the valve body 24a.SELECTED DRAWING: Figure 4

▲高▼橋 英憲
Tetsuya Nakamura
Eiichi Kawase
Shinsuke Kataoka

JP2018049045A

July 20, 2022

March 16, 2018

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Mazda Corporation Inc

B29C39/24; B29B7/74; B29B7/76; B29B13/02; B29B13/04; B29C44/38

JP56044640A
JP2015510566A
JP8011129A
JP62058612U
JP63267527A

US4150074
US5423488
US20110059255
KR1020130082024A

Maeda patent office

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