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Title:
FLUID MIXING UNIT, FLUID MIXING DEVICE AND FLUID MIXING SYSTEM INTEGRATING THE SAME
Document Type and Number:
Japanese Patent JP2007196218
Kind Code:
A
Abstract:

To provide a fluid mixing device that mixes jetted fluids each having a prescribed angle to the surface of a substrate.

The fluid mixing device has a plurality of channels conveying the fluids and a plurality of spouts provided to communicate with the channels, and mixes a plurality of the fluids by allowing the advancement directions of the fluids jetted from the plurality of spouts to intersect with each other, wherein the plurality of spouts are provided on the surface of the substrate and a central axis in the channels provided in the substrate communicating with the spouts is partially deviated to slant the advancement direction of the fluid jetted from at least one of the spouts to the surface of the substrate.

COPYRIGHT: (C)2007,JPO&INPIT


Inventors:
EZAKI TAKAHIRO
YASUDA SUSUMU
TSUKADA MAMORU
TEJIMA TAKAYUKI
NAKAHAMA KAZUMICHI
CHO KENROKU
Application Number:
JP2006345018A
Publication Date:
August 09, 2007
Filing Date:
December 21, 2006
Export Citation:
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Assignee:
CANON KK
International Classes:
B01F25/70; B01J19/00; B05B7/06; B05B7/08
Attorney, Agent or Firm:
Tokuhiro Watanabe