Title:
流体ノズルおよび基板洗浄装置、並びに基板の洗浄方法
Document Type and Number:
Japanese Patent JP5678217
Kind Code:
B2
Inventors:
▲トン▼ 志明
Application Number:
JP2014001461A
Publication Date:
February 25, 2015
Filing Date:
January 08, 2014
Export Citation:
Assignee:
億力▲シン▼系統科技股▲フン▼有限公司
International Classes:
H01L21/304; B05B7/04; B08B3/02; B08B3/08
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Jitsuhiro
Masatake Shiga
Takashi Watanabe
Shinya Jitsuhiro