Title:
流体印刷装置
Document Type and Number:
Japanese Patent JP7332701
Kind Code:
B2
Abstract:
Fluid printing apparatus including substrate, print head, pneumatic system, and print head positioning system. The print head ejects fluid in a continuous stream with a micro-structural fluid ejector consisting of output, elongate input, and tapering portions between the output and elongate input portions. The output portion consists of an exit orifice of an inner diameter ranging between 0.1 μm and 5 μm and an end face having a surface roughness of less than 0.1 μm. The print head is positioned above the substrate with the output portion of the micro-structural fluid ejector pointing downward. During printing, the print head positioning system maintains a vertical distance between the end face and the printable surface of the substrate within a range of 0 μm to 5 μm, and the pneumatic system applies pressure to the fluid in the micro-structural fluid ejector in the range of −50,000 Pa to 1,000,000 Pa.
Inventors:
Graneck, Philip
Wiatrowska, Aneta
Figeac, Krzysztof
Dasza, Mihau
Chichon, Przemyslaw
Kowaljewski, Pyotr
Wiatrowska, Aneta
Figeac, Krzysztof
Dasza, Mihau
Chichon, Przemyslaw
Kowaljewski, Pyotr
Application Number:
JP2021541728A
Publication Date:
August 23, 2023
Filing Date:
March 20, 2019
Export Citation:
Assignee:
XTPL S.A.
International Classes:
B05C5/00; B05C11/10; H01L21/3205; H01L21/336; H01L21/768; H01L21/82; H01L23/522; H01L23/532; H01L29/786
Domestic Patent References:
| JP2002096474A | ||||
| JP2004259852A | ||||
| JP2002104595A | ||||
| JP2004202432A | ||||
| JP5155009A |
Foreign References:
| US20140092158 | ||||
| KR1020120036268A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito