Title:
流体供給装置およびこの装置における液体排出方法
Document Type and Number:
Japanese Patent JP7133857
Kind Code:
B2
Abstract:
A fluid supply device includes a condenser, a tank that stores the fluid, a pump that pressure-feeds the fluid toward a processing chamber, a main pipe connecting the tank and the pump and transferring the liquid stored in the tank to the pump using a weight of the liquid, and a discharging pipe that is connected to the main pipe at a lowest position of the main pipe at one end, is opened to the atmosphere at the other end, and vaporizes and discharges the liquid in the tank and the main pipe to the outside. The discharging pipe is formed so that, after the liquid in the tank and the main pipe is fully discharged, a liquid pool that separates a space on the atmosphere side and a space on the main pipe side of the discharging pipe is temporarily produced in the discharging pipe.
Inventors:
Toshihide Yoshida
Yukio Minami
Tsutomu Shinohara
Yukio Minami
Tsutomu Shinohara
Application Number:
JP2019536723A
Publication Date:
September 09, 2022
Filing Date:
July 31, 2018
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
H01L21/304; B01J4/00; B05C11/10; B05D3/00; F25J1/00
Domestic Patent References:
| JP2013012538A | ||||
| JP2014101241A | ||||
| JP2014034027A |
Foreign References:
| WO2014083639A1 |
Attorney, Agent or Firm:
Patent business corporation ken intellectual property general office
Kenji Fujimoto
Kenji Fujimoto