Title:
FLUID SUPPLY UNIT
Document Type and Number:
Japanese Patent JP2021085470
Kind Code:
A
Abstract:
To provide a fluid supply unit capable of reducing the number of fluid introducing portions.SOLUTION: A fluid supply unit 100 is equipped with a plurality of fluid supply lines 1 extended in a first direction and aligned in a second direction orthogonal to the first direction, and a joint member 2 that is provided over one end portions of the plurality of adjacent fluid supply lines 1 and branching a flow of process gas or purge gas supplied from the fluid supply source to the plurality of fluid supply lines 1. The joint member 2 has a single fluid inflow channel 21 connected to the fluid supply source, three fluid branching outflow channel 22 respectively connected to the three fluid supply lines 1, and a single communication channel 23 formed between the fluid inflow channel 21 and the three fluid branching outflow channel 22, and communicating between the fluid inflow channel 21 and the three fluid branching outflow channel 22.SELECTED DRAWING: Figure 1
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Inventors:
SATOMI YUKI
AIKAWA KENJI
TSUJINO KENGO
INADA TOSHIYUKI
AIKAWA KENJI
TSUJINO KENGO
INADA TOSHIYUKI
Application Number:
JP2019215236A
Publication Date:
June 03, 2021
Filing Date:
November 28, 2019
Export Citation:
Assignee:
FUJIKIN KK
International Classes:
F16K27/00; F16L41/03; F16L47/26
Attorney, Agent or Firm:
Goto Patent Office