Title:
FLUID TRANSPORT APPARATUS AND METHOD OF MANUFACTURING OPTICAL FILM
Document Type and Number:
Japanese Patent JP2009248022
Kind Code:
A
Abstract:
To efficiently form a coating film uniform in thickness on a substrate.
The fluid transport apparatus is provided with: a discharge means 10 for discharging a coating liquid on a substrate; a first storage means 20 for storing the coating liquid supplied to the discharge means; a second storage means 30 for storing the coating liquid sent to the first storage means; a pressurizing means 50 for pressurizing the inside of the first storage means and the inside of the second storage means; and a ventilation means 60 for communicating the inside of the first storage means and the inside of the second storage means with each other.
Inventors:
TAYA SEIYA
FUKUMOTO MAKOTO
AKIYAMA HIROMI
NAKAMURA TAKEHARU
MIAMA NAONOBU
NAKAJIMA YOSHIYUKI
FUKUMOTO MAKOTO
AKIYAMA HIROMI
NAKAMURA TAKEHARU
MIAMA NAONOBU
NAKAJIMA YOSHIYUKI
Application Number:
JP2008100573A
Publication Date:
October 29, 2009
Filing Date:
April 08, 2008
Export Citation:
Assignee:
HITACHI MAXELL
International Classes:
B05C11/10; B05D3/00; B05D7/00; G02B1/11; B05C5/02
Attorney, Agent or Firm:
Ikeuchi, Sato & Partners