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Title:
FLUID TRANSPORTATION ACTUATOR
Document Type and Number:
Japanese Patent JP2021181782
Kind Code:
A
Abstract:
To provide a fluid transportation actuator capable of improving operation resistance, preventing interference of driving frequency caused by adjacent resonance emission, enhancing structural strength and toughness, and reducing influence of physical damage on a piezoelectric thin plate.SOLUTION: A fluid transportation actuator comprises a silencing jet orifice sheet, a chamber frame, an actuator, an insulation frame, and a conductive frame. The silencing jet orifice sheet includes a silencing sheet, a suspension sheet, and a hollow hole, and the suspension sheet can be bent and vibrated. The actuator is reciprocally bent and vibrated by application of voltage. The actuator drives resonance of the silencing jet orifice sheet, so that the suspension sheet is reciprocally vibrated and displaced, and fluid is transported.SELECTED DRAWING: Figure 3

Inventors:
MO HAO RAN
JHANG JYUN YI
TSENG CHUN LUNG
CHEN SHIH CHANG
LIAO JIA YOO
HUANG QI FENG
HAN YONG LONG
KU YANG
LU YI TING
Application Number:
JP2021081319A
Publication Date:
November 25, 2021
Filing Date:
May 12, 2021
Export Citation:
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Assignee:
MICROJET TECHNOLOGY CO LTD
International Classes:
F04B45/047; B25J19/00; F04B43/02; F04B43/04; F04B45/04; H01L41/053; H01L41/09
Attorney, Agent or Firm:
sk patent corporation
Akihiko Okuno
Hiroyuki Ito