Title:
液体気化器
Document Type and Number:
Japanese Patent JP5810101
Kind Code:
B2
Abstract:
A liquid vaporizer is configured to vaporize a liquid reagent and mix the vaporized liquid reagent with a gaseous medium. The liquid vaporizer is equipped with a main vaporizer body having a mixed gas generating space, and a vaporizing unit disposed inside the mixed gas generating space. The vaporizing unit has a vaporizing unit main body having a vaporization surface and a net-shaped body formed in a planar shape by knitting wires regularly in a net-like shape. The net-shaped body forms a plurality of mesh spaces surrounded by the wires and arranged regularly in the in-plane direction. The vaporizing unit forms a plurality of liquid reagent supply spaces surrounded by the wires and the vaporization surface as a result of the net-shaped body and the vaporization surface being abutted against each other. The liquid reagent supply spaces are arranged regularly in the in-plane direction of the net-shaped body.
Inventors:
Masayuki Koji
Hiroshi Itato
Hiroshi Itato
Application Number:
JP2012553555A
Publication Date:
November 11, 2015
Filing Date:
September 01, 2011
Export Citation:
Assignee:
CKD Corporation
International Classes:
B01J7/00; B01F23/10
Domestic Patent References:
| JPS4952175A | 1974-05-21 | |||
| JPH07155584A | 1995-06-20 | |||
| JPH09152287A | 1997-06-10 | |||
| JPH09294805A | 1997-11-18 | |||
| JP2002228117A | 2002-08-14 | |||
| JPH09327257A | 1997-12-22 |
Attorney, Agent or Firm:
Tsuyoshi Yamada
Hiroshi Matsuda
Hiroshi Matsuda