Title:
蛍光体
Document Type and Number:
Japanese Patent JP4608572
Kind Code:
B2
Abstract:
In an electron beam detector, a light guide optically couples a fluorescence emitting surface of the compound semiconductor substrate to a light incident surface of the photodetector, and physically connects the compound semiconductor substrate with the photodetector, thereby integrating the compound semiconductor substrate with the photodetector. When the compound semiconductor substrate converts incident electrons to fluorescent light, the light guide guides the fluorescent light to the photodetector, and the photodetector detects the fluorescent light, thereby detecting the incident electrons.
Inventors:
Minoru Kondo
Nagai Toshimitsu
Jun Kizuna
Nagai Toshimitsu
Jun Kizuna
Application Number:
JP2008283431A
Publication Date:
January 12, 2011
Filing Date:
November 04, 2008
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01T1/20; C09K11/56; C09K11/74; C09K11/88; G01T1/202; H01J1/63; H01J29/38; H01J37/244; H01J40/16; H01J43/04; H01J43/22; H01J49/00; H01J49/06
Domestic Patent References:
JP54018269A | ||||
JP2000008035A | ||||
JP11339681A | ||||
JP2000249768A |
Attorney, Agent or Firm:
Kazuhiro Kitazawa
Shin Koizumi
Akiko Ichikawa
Kunihiko Wakabayashi
Shin Koizumi
Akiko Ichikawa
Kunihiko Wakabayashi