Title:
フッ化物薄膜の製造方法
Document Type and Number:
Japanese Patent JP4483197
Kind Code:
B2
Inventors:
Hiroyuki Okita
Toshitaka Kawashima
Toshitaka Kawashima
Application Number:
JP2003106966A
Publication Date:
June 16, 2010
Filing Date:
April 10, 2003
Export Citation:
Assignee:
ソニー株式会社
International Classes:
C23C14/34; G02B1/11; C01B9/08; C01F5/28; C01F7/50; C23C14/06
Domestic Patent References:
| JP4160049A | ||||
| JP8267643A | ||||
| JP8090706A | ||||
| JP62029144A | ||||
| JP51121019A |
Attorney, Agent or Firm:
Yoshitsuno Kakuda
Hironobu Isoyama
Hironobu Isoyama