Title:
FLUORINE ADDED QUARTZ GLASS ARTICLE AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2004307282
Kind Code:
A
Abstract:
To provide a fluorine added quartz glass article containing only a small quantity of OH groups and a method of manufacturing the same.
In the heating of a porous glass preform under a fluorine gas atmosphere, the pressure in a chamber is made positive. The heating is carried out particularly for transparently vitrifying the preform at 1,350°C. The pressure in the chamber is a positive pressure of 10 to 500 Pa preferably to prevent sucking ambient air from a seal part. The moisture content in a gas supplied to the chamber is controlled to ≤3 ppm. The fluorine added quartz glass article containing ≤50 ppb OH group is manufactured using the method of manufacturing the fluorine added quartz glass article.
Inventors:
ABE ATSUSHI
MANTOKU NOBUYASU
MANTOKU NOBUYASU
Application Number:
JP2003104150A
Publication Date:
November 04, 2004
Filing Date:
April 08, 2003
Export Citation:
Assignee:
SHINETSU CHEMICAL CO
International Classes:
C03B20/00; C03B37/014; (IPC1-7): C03B20/00; C03B37/014
Attorney, Agent or Firm:
Kanji Arai
Naotaka Kono
Eiichiro Shimazaki
Naotaka Kono
Eiichiro Shimazaki