Title:
フッ素原子含有重合性不飽和単量体、フッ素原子含有高分子化合物及びフォトレジスト用樹脂組成物
Document Type and Number:
Japanese Patent JP4295052
Kind Code:
B2
Inventors:
Hiroshi Koyama
Seiharu Tsutsumi
Seiharu Tsutsumi
Application Number:
JP2003322602A
Publication Date:
July 15, 2009
Filing Date:
September 16, 2003
Export Citation:
Assignee:
Daicel Chemical Industry Co., Ltd.
International Classes:
C08F220/22; C07C67/03; C07C69/013; C07C69/54; C08F20/22; C08F220/18; G03F7/004; G03F7/039
Domestic Patent References:
| JP2002327013A | ||||
| JP2002006501A | ||||
| JP2004123687A |
Attorney, Agent or Firm:
Yukihisa Goto