Title:
フッ素化合物含有ガスの処理方法及び処理装置
Document Type and Number:
Japanese Patent JP5318333
Kind Code:
B2
Inventors:
Takashi Sasaki
Shuichi Sugano
Shin Tamada
Shuichi Sugano
Shin Tamada
Application Number:
JP2006132068A
Publication Date:
October 16, 2013
Filing Date:
May 11, 2006
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
B01D53/46; B01D53/70; B01D53/86
Domestic Patent References:
| JP6063357A | ||||
| JP3146114A | ||||
| JP6178913A | ||||
| JP3106419A | ||||
| JP2000117052A | ||||
| JP2005324102A | ||||
| JP2004162963A | ||||
| JP2001170437A |
Attorney, Agent or Firm:
Yukio Uchida
Minoru Terada
Minoru Terada