To provide a fluorine-contained compound recovery machine, avoiding moisture in a pipeline connected to a recovery cylinder from being frozen without recovering excessive fluorine-contained compound to efficiently recover the fluorine-contained compound.
This recovery machine 10 includes: a compressor 14; the cylinder 16 connected to the compressor 14 through a connecting pipe 15 and adapted to recover the liquefied fluorine-contained compound through the connecting pipe 15; and a cooling means, wherein water in the connecting pipe 15 is cooled at a temperature not to solidify water in the connecting pipe by the cooling means. The cooling means includes a water tank 18 storing water W with the cylinder 16, a pump P, a circulating means having an inlet port 22, a discharge opening 24, and a circulating passage 23 connected to the inlet port 22 and the discharge opening 24, and a heat exchanger 26.
TATO KOJI
CHUKYO FRON CO LTD
JPH11201592A | 1999-07-30 | |||
JPS57200793A | 1982-12-09 | |||
JP2004116885A | 2004-04-15 | |||
JP2001241597A | 2001-09-07 | |||
JP2000246042A | 2000-09-12 | |||
JP2001312947A | 2001-11-09 |
Makoto Onda