Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
FLUORINE-CONTAINING COMPOUND, FLUORINE-CONTAINING POLYMERIZABLE MONOMER, FLUORINE-CONTAINING POLYMER, DISSOLUTION INHIBITOR, RESIST MATERIAL USING THESE
Document Type and Number:
Japanese Patent JP2004217533
Kind Code:
A
Abstract:

To provide a new fluorine-containing compound, a new fluorine-containing polymerizable monomer and a new fluorine-containing polymer which each has a high fluorine content, has specific polar groups in an identical molecule, and has high transparency, and to provide a dissolution inhibitor and a resist material which each uses these substances.

This fluorine-containing compound contains substituents represented by the general formula (1). Therein, R1 is a straight chain or branched alkyl or alkylene, a cyclic structure group containing an aromatic group or alicyclic group, or a composite substituent comprising an aromatic group and an alicyclic group, wherein R1 may partially contain F, a halogen, CN, O, N, Si, or an alcohol; R2 is H, a straight chain or branched alkyl, an aromatic group or a hydrocarbon group which may contain an alicyclic group, wherein R2 may contain F, O, N, carbonyl bond or an alcohol; a plurality of R2 groups having different structures may be contained in an identical molecule.


Inventors:
NARITA TADASHI
MAEDA KAZUHIKO
Application Number:
JP2003004262A
Publication Date:
August 05, 2004
Filing Date:
January 10, 2003
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CENTRAL GLASS CO LTD
International Classes:
G03F7/004; C07C31/20; C07C31/44; C07C33/48; C07C43/23; C07C69/65; C07C69/653; C07C69/78; C07D319/12; C08F14/18; C08F16/26; C08F20/28; G03F7/038; G03F7/039; (IPC1-7): C07C69/78; C07C31/20; C07C43/23; C07C69/653; C08F14/18; G03F7/004
Attorney, Agent or Firm:
Yoshiyuki Nishi