To provide a new fluorine-containing compound, a new fluorine-containing polymerizable monomer and a new fluorine-containing polymer which each has a high fluorine content, has specific polar groups in an identical molecule, and has high transparency, and to provide a dissolution inhibitor and a resist material which each uses these substances.
This fluorine-containing compound contains substituents represented by the general formula (1). Therein, R1 is a straight chain or branched alkyl or alkylene, a cyclic structure group containing an aromatic group or alicyclic group, or a composite substituent comprising an aromatic group and an alicyclic group, wherein R1 may partially contain F, a halogen, CN, O, N, Si, or an alcohol; R2 is H, a straight chain or branched alkyl, an aromatic group or a hydrocarbon group which may contain an alicyclic group, wherein R2 may contain F, O, N, carbonyl bond or an alcohol; a plurality of R2 groups having different structures may be contained in an identical molecule.
MAEDA KAZUHIKO