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Title:
FLUORINE RUBBER COMPOSITION
Document Type and Number:
Japanese Patent JP2008056739
Kind Code:
A
Abstract:

To provide a fluorine-containing rubber composition capable of forming a vulcanized molded product excellent in performance, even when exposed to plasma under a high load.

The fluorine rubber composition contains 0.7-2.4 pts.wt. polyfunctional unsaturated compound co-crosslinking agent and 0.3-1.0 pt.wt. organic peroxide per 100 pts.wt. fluorine rubber which has a fluorine content of 68 wt.% and can be subjected to peroxide crosslinking. The vulcanized molded product obtained from the fluorine rubber composition is excellent in resistance against O2 plasma treatment and particularly excellent in crack resistance when exposed to plasma under a high load. If the vulcanized molded product is a sealing, it gives required values for normal-state physical properties and compression set. The vulcanized molded product having such properties can be suitably used as components of an apparatus for manufacturing a semiconductor or a liquid crystal, e.g. a sealing, a conveying roller, etc.


Inventors:
Miyoshi, Yuji
Application Number:
JP2006000232383
Publication Date:
March 13, 2008
Filing Date:
August 29, 2006
Export Citation:
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Assignee:
NOK CORP
International Classes:
C08L27/12; C08K5/14; C09K3/10; F16C13/00; F16J15/10; C08L27/00; C08K5/00; C09K3/10; F16C13/00; F16J15/10