Title:
FLUORORUBBER SEALING MATERIAL AND ITS TREATING METHOD
Document Type and Number:
Japanese Patent JP3838634
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a fluororubber sealing material which is excellent in peelability and very scarcely emits gases.
SOLUTION: The fluororubber sealing material is obtained by crosslinking a fluororubber or a fluororubber composition by a heat treatment in an inert gas, and emits gases in an amount of at most 4 ppm when held at 100°C for 30 min.
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Inventors:
Yamada Hitoshi
Hashimoto Kinro
Go Kuboyama
Hashimoto Kinro
Go Kuboyama
Application Number:
JP2002068809A
Publication Date:
October 25, 2006
Filing Date:
March 13, 2002
Export Citation:
Assignee:
Nichias Corporation
International Classes:
C08J3/24; C09K3/10; C08J7/00; H01L21/673; H01L21/68; (IPC1-7): C09K3/10; C08J3/24; C08J7/00; H01L21/68; //C08L27:16
Domestic Patent References:
JP6107803A | ||||
JP6107826A | ||||
JP10087935A |
Foreign References:
WO2001085848A1 |
Attorney, Agent or Firm:
Shohei Oguri
Hironori Honda
Toshimitsu Ichikawa
Takeshi Takamatsu
Hironori Honda
Toshimitsu Ichikawa
Takeshi Takamatsu
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