Title:
FLY CUTTER
Document Type and Number:
Japanese Patent JP2022035272
Kind Code:
A
Abstract:
To provide a fly cutter for safely processing a workpiece having bumps formed on its front face.SOLUTION: A fly cutter 1 cuts an upper face 75c of a BG film 75 adhered to a workpiece 7 including: a bump region 73 where bumps 71 are formed on a front face 72; and an outer peripheral region 74 around the bump region 73. The fly cutter 1 comprises: a fly cutting tool 21; a tool spindle 22, fitted with the fly cutting tool 21 on a lower end, which can lift and lower the fly cutting tool 21 in a rotating state; and a chuck 3 which rotatably holds the workpiece 7. The fly cutting tool 21 cuts the upper face 75c of the BG film 75 from the center to the outer periphery.SELECTED DRAWING: Figure 6
Inventors:
ISHIKAWA KAZUMASA
Application Number:
JP2020139473A
Publication Date:
March 04, 2022
Filing Date:
August 20, 2020
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
H01L21/304; B23D5/00; B23Q11/10; B23Q17/20; B24B41/06; H01L21/301
Attorney, Agent or Firm:
Takamitsu Shimizu