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Patent Searching and Data


Title:
FOAM PLASTIC SHEET FOR POLISHING AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2003209078
Kind Code:
A
Abstract:

To provide a polishing pad in which clogging hardly occurs and the variation of polishing performance is reduced in the field of polishing, in particular, in a CMP process.

A foam plastic sheet having long air bubbles arrayed in the same direction is manufactured as follows. As raw material plastic, a thermoplastic polyurethane elastomer (produced by DAINICHISEIKA Color and Chemicals MFG. Co,. Ltd.) is used and carbon dioxide and the raw material plastic are mixed in a first extruder. Resin pressure in a mixing zone is 25 MPa, a resin temperature is 200°C, and the carbon dioxide is in a supercritical state. The cross section of the sheet is observed along with an MD direction by an electron microscope. As a result, an average minor axis length is 24 μm, an average major axis length is 50 μm and an aspect ratio is 2.1.


Inventors:
MASAKI YOSHINORI
Application Number:
JP2002006365A
Publication Date:
July 25, 2003
Filing Date:
January 15, 2002
Export Citation:
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Assignee:
SUMITOMO BAKELITE CO
International Classes:
B24B37/20; B24B37/24; C08J9/36; H01L21/304; (IPC1-7): H01L21/304; B24B37/00; C08J9/36