泡除去装置、それを備えた異物検査装置、及び、泡除去方法

Title:

泡除去装置、それを備えた異物検査装置、及び、泡除去方法

Document Type and Number:

Japanese Patent JP5894829

Kind Code:

B2

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Inventors:

Yoshinori Mizoguchi
Koichi Ito
Tadashi Hataki
Fukushima Hide

Application Number:

JP2012068324A

Publication Date:

March 30, 2016

Filing Date:

March 23, 2012

Export Citation:

Assignee:

Fuji Electric Co., Ltd.
Comb Giken Co., Ltd.

International Classes:

B01D19/00; G01N21/90

Domestic Patent References:

Attorney, Agent or Firm:

Yoshiyuki Osuga

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