To provide a foamed sheet material capable of performing long-time stable polishing work.
A polishing pad 10 includes the polyurethane-resin foamed sheet material 2 having a foamed structure in which a plurality of foams 3 and a number of micropores 6 are continuously formed in a wet deposition method. The sizes of the number of micropores 6 are smaller than the sizes of the foams 3. In the foamed structure of the foamed sheet material 2, reinforcing resin 5 exists in the number of micropores 6 so that the rate of the volume of the reinforcing resin 5 existing therein to the volume of the micropores 6 is 30% or more. The reinforcing resin 5 is formed by impregnating the foamed sheet material 2 with resin emulsion. The reinforcing resin 5 reinforces the foamed structure of the foamed sheet material 2.
IWAO TOMOHIRO
JITSUTANI MASAHITO
| JPH02250776A | 1990-10-08 | |||
| JPH0959395A | 1997-03-04 | |||
| JPH058178A | 1993-01-19 | |||
| JP2005034971A | 2005-02-10 | |||
| JP2001287152A | 2001-10-16 |