To solve a problem on a focal plane inclination type cofocal surface profile measuring device having a confocal imaging system enabling the surface profile measurement of an object without the use of a Z-scan mechanism, in that the three dimensional surface profile measurement can be erratic since the exposure time becomes extremely short at the time of high speed measurement, and to acquire an image receiving an appropriate light quantity by securing long exposure time, enabling the normal three dimensional measurement.

The speed of the movement of the object made by the moving mechanism of the focal plane inclination type cofocal surface profile measuring device is set to be equal to that of the movement of a spot by a fine shift mechanism, thereby enabling the cofocal image pick-up system to expose the same point on the object for long time to carry out the three dimensional surface profile measurement.