Title:
箔マノメータ
Document Type and Number:
Japanese Patent JP4083239
Kind Code:
B2
Abstract:
A pressure gauge device that is operated as a thermal conduction manometer contains a measuring resistor (131) that is arranged in layer form on a self-supporting carrier foil and is in defined thermal contact with a gas whose pressure is to be measured. The thermal contact with the gas is through the carrier foil (11), a thermal conducting layer (123) and optionally through an extra absorber layer (124). The resistance, dependent on gas pressure, of the measuring resistor (131) is detected by a bridge circuit in which each measuring resistor (131) is assigned a reference resistor (136) whose resistance itself is dependent on or independent of pressure.
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Inventors:
Mast, Curl-Friedrich
Shram, Gerold
Munch, Martin
Shram, Gerold
Munch, Martin
Application Number:
JP54323198A
Publication Date:
April 30, 2008
Filing Date:
March 19, 1998
Export Citation:
Assignee:
Maxx-Plank-Gezelle Shaft Tool Fürdellung Der Weizsen Schaften Ahuau
International Classes:
G01L11/00; G01L21/12; G01L21/10
Domestic Patent References:
| JP6241933A | ||||
| JP7325002A | ||||
| JP6331404A | ||||
| JP7307479A | ||||
| JP8145751A | ||||
| JP4313027A | ||||
| JP62211513A | ||||
| JP3123217U | ||||
| JP7113560B2 | ||||
| JP8023308B2 | ||||
| JP4507291A |
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Ryo Hashimoto
Toshio Shirane
Sadao Muramatsu
Ryo Hashimoto
Toshio Shirane