Title:
FOLDED LONGITUDINAL TORSIONAL HINGE FOR GIMBALED MEMS MIRROR HINGE
Document Type and Number:
Japanese Patent JP2010198029
Kind Code:
A
Abstract:
To provide a hinge used with a dual axis micromirror such as an MEMS array and a parallel plate electrostatic operation, that allows for a compliant torsional rotation while simultaneously restricting net vertical and horizontal displacement.
A circular mirror (12) is connected to a gimbal (44) at opposing, but at locations (36) and (37) deviated from the center axis with compound longitudinal hinges (40) and (42).
COPYRIGHT: (C)2010,JPO&INPIT
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Inventors:
STAKER BRYAN P
BANYAI WILLIAM C
BANYAI WILLIAM C
Application Number:
JP2010091585A
Publication Date:
September 09, 2010
Filing Date:
April 12, 2010
Export Citation:
Assignee:
GLIMMERGLASS NETWORKS INC
International Classes:
G02B26/08; B81B3/00; G02B26/10
Domestic Patent References:
| JPH08329181A | 1996-12-13 | |||
| JP4537071B2 | 2010-09-01 |
Foreign References:
| WO2000020899A2 | 2000-04-13 |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa