Title:
FORCE SENSOR AND GRASPING DEVICE
Document Type and Number:
Japanese Patent JP2015219045
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To solve the problem with a force sensor for detecting a contact load, etc., that when the area of a detection element of a unit becomes large, the area of a membrane becomes large and the deformation of the membrane due to a load becomes large.SOLUTION: A force sensor 101 of capacitance type according to the present invention has a plurality of cells each configured with a lower electrode 104, a movable part including an upper electrode 107 and having flexibility, and a support part 105b for movably supporting the movable part and forming a gap 106 between the upper and lower electrodes. A protrusion 123 is provided above the movable part of the cell, and the plurality of cells are grouped into elements including one or more cells, the cells in the same element being electrically connected to each other.
Inventors:
SOEDA YASUHIRO
Application Number:
JP2014100983A
Publication Date:
December 07, 2015
Filing Date:
May 14, 2014
Export Citation:
Assignee:
CANON KK
International Classes:
G01L5/00
Attorney, Agent or Firm:
Kazuo Kato